Development of micro array sensor for aerial ultrasonic of 1 MHz

Abstract We developed a Micro Electro‐Mechanical Systems ultrasonic array sensor that is capable of detecting 1 MHz airborne waves for use in devices inspecting the interior objects. The an vibrating membranes, each consisting metal lower electrode, platinum upper and polymer ferroelectric layer between them. In this study, two kinds electrode materials, aluminum or gold, were used to investigate how they affect characteristics such high resonant‐frequency sensors. using showed about four times better sensitivity than gold.